Optical Inspection & Metrology
Direct Drive Applications
Optical Inspection & Metrology — Direct Drive Applications
AOI optical inspection, coordinate measuring machines and test machines demand extremely smooth, vibration-free motion with nanometer-level stability and repeatability. Direct-drive motors eliminate the backlash and hysteresis of the drive train: ironless linear motors deliver cogging-free motion, RMK/RMF slotless motors move exceptionally evenly, and RDDS rotary subsystems serve as ready-to-use testing tables — ensuring that measurement results are unaffected by drive vibration.
Drive Challenges in Metrology & InspectionDrive challenges in metrology & inspection
Measuring platforms and inspection axes impose the highest requirements on motion smoothness, positioning stability and integration.
Ultra-Smooth, Vibration-Free MotionUltra-Smooth, Vibration-Free Motion
Measurement and inspection are extremely sensitive to vibration. UPLplus ironless linear motors have no cogging force or ripple force; RMK/RMF slotless iron-core motors have low attractive force and move exceptionally evenly, ensuring smooth scanning and measuring.
Positioning Accuracy & RepeatabilityPositioning Accuracy & Repeatability
Direct drive eliminates transmission backlash and hysteresis, so positioning accuracy depends directly on the measuring system. Subsystems with integrated measuring systems provide closed-loop position feedback for high-repeatability measuring positioning.
Ready-to-Use Testing TablesReady-to-Use Testing Tables
Rotary measurement and testing require a ready-to-use module integrating motor, bearing, measuring system and cooling. The official RDDS rotary direct-drive subsystem applications include testing tables, serving the metrology industry.
Compact Integration & Maintenance-FreeCompact Integration & Maintenance-Free
Measuring instruments are space-constrained and require long-term stability. Direct drive is contactless, wear-free and maintenance-free; UPLplus is compact and lightweight, and Z-axis actuators integrate the measuring system, benefiting miniaturization and long-term consistency of measuring instruments.
Direct Drive Solutions for Metrology & InspectionDirect drive solutions for metrology & inspection
Linear motors as scanning axes, RDDS subsystems as rotary testing tables, RMK/RMF for exceptionally even rotation, and Z-axes as inspection lift axes.
Ironless Linear MotorIronless Linear Motor
Ironless linear motor with no cogging or ripple force, moving extremely smoothly, explicitly listed for metrology and inspection machines. With +42% force-to-mass ratio and low moving mass, it is ideal for the high-dynamic scanning axes of AOI and optical metrology platforms.
- Peak force 100 – 1,300 N, speed up to 30.4 m/s
- No cogging (ironless design), extremely smooth motion
- OEM applications: metrology and inspection machines, air bearings
RDDS Rotary Direct Drive SystemsRotary Direct Drive Systems
Ready-to-use rotary modules integrating torque motor, precision bearing, measuring system and cooling, with official applications explicitly listing testing tables, serving the metrology industry. Zero backlash, high stiffness and smooth running make them a ready-to-use solution for rotary measuring tables and test turntables.
- RDDS1 Ø130 – 230 mm, RDDS2 Ø240 – 565 mm
- Integrated motor + bearing + measuring + cooling
- Zero backlash, high stiffness, smooth running
- Official applications: testing tables, metrology industry
Slotless Iron-Core Torque MotorSlotless Torque Motor
Slotless iron-core permanent-magnet AC synchronous motor with low attractive force, exceptionally even motion and optimal synchronism, ideal for high-precision rotary measurement with almost no external force in the direction of motion. Highly flexible in design and diameter, integrable into measuring mechanisms in flat or coaxial configurations.
- Diameter 70 – 2,500 mm, torque 2 – 15,000 Nm
- No cogging, exceptionally even motion, optimal synchronism
- Flat or coaxial design, for high-precision applications
Z-Axis Short Stroke ActuatorsZ-Axis Short Stroke Actuators
Schaeffler Z-axis modules are used in optical inspection and test machines. The LDDS-078 voice-coil Z-axis is compact, integrates measuring and is reliable to one billion cycles; the LRAM air-bearing Z-axis is frictionless with a moving mass of only 10 g, ideal for probe testing and lightweight inspection lift axes.
- LDDS-078 stroke 5 mm, integrated measuring system
- LRAM frictionless air bearings, acceleration up to 1,000 m/s²
- Applications: optical inspection, test machines, probe testing
Typical Applications in Metrology & InspectionTypical applications in metrology & inspection
Wafer AOI inspection, optical scanning and multi-layer measuring/drilling are all achieved with direct-drive multi-axis platforms; ironless linear motors provide cogging-free, constant-scan-speed smooth motion, and direct-drive rotary axes provide high-precision alignment, ensuring measurement image quality and repeatability.
Explore Related ApplicationsExplore related applications
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