Application Guide
Precision Linear Guidance
Industry Application Overview
Schneeberger Precision Linear Guidance — Industry Application Guide
Schneeberger offers a complete precision linear guidance product portfolio — from miniature profile rail guides (MINIRAIL), cross-roller guideways (Type R / RN / RNG), and needle cage guideways (Type N/O) to micro frictionless tables (MINISLIDE MS / MSQ) — complemented by MINISCALE PLUS and MSQscale integrated measuring systems, serving semiconductor, medical, optics, metrology and other high-precision industries.
Industry Applications
Browse Applications by Industry
Each industry page features Schneeberger official application cases as the primary content, supplemented by comparable application scenarios from the industry.
Medical Technology
Medical Technology
Surgical robots, diagnostic equipment, dental milling/scanning, liquid handling, microtomes, microscopes. Schneeberger's medical technology division offers solutions for 10+ application areas.
MINIRAIL Type RNG MINISLIDE MS
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Semiconductor Inspection & Metrology
Semiconductor Inspection & Metrology
Reticle inspection & repair, wafer AOI, XYZT fully integrated metrology stages. Approx. 40 years of SEMI industry experience, nanometer stability and ms settling time.
Custom Positioning Type R / RN MINIRAIL
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Vacuum Positioning Systems
Vacuum Positioning Systems
Operating at 10⁻⁹ mbar partial pressure, E-beam inspection, EUV metrology, SEM positioning. All aluminum parts internally machined for outgassing control, cleanroom assembly.
Custom Vacuum Systems MINISLIDE MS MINIRAIL PEEK
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Back-End Assembly & Electronics
Back-End Assembly & Electronics
Die bonding, wire bonding, SMT placement, PCB inspection. MINIRAIL's consistent preload reduces assembly time, MINISLIDE MSQ provides high-rigidity short-stroke positioning.
MINIRAIL MINISLIDE MSQ Type RN
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Metrology Instruments
Metrology Instruments
CMM, laser interferometers, surface roughness testers, optical metrology stages. Official case: laser interferometer manufacturer selected MINIRAIL. Cross-roller guideways with ultra-low waviness.
Type R / RN MINIRAIL Type N/O
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Optics & Photonics
Optics & Photonics
Optical scanning stages, laser processing, fiber-PIC alignment, lens positioning. Cross-roller guideways for precision alignment, MSQ for high-speed laser deflection.
Type R / RN MINISLIDE MSQ MINIRAIL
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Lab Automation & Life Sciences
Lab Automation & Life Sciences
Liquid handling, DNA sequencing, biochemical analyzers, microscopes. MSQscale integrated guidance and measuring system ideal for space-constrained lab instruments.
MSQscale MINIRAIL MINISLIDE MS
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Flat Panel Display
Flat Panel Display
800+ systems installed worldwide. From Gen 4 to Gen 12, 4-head gantry AOI, color filter printing, substrate AOI, optical gap interferometry.
Custom FPD Systems MONORAIL
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Advanced Packaging
Advanced Packaging
Zircon system for die-to-wafer hybrid bonding, serving AI accelerators, HPC, 5G chiplets. Sub-micron accuracy, fully automated integration.
Zircon Custom Systems Type RN
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Additive Manufacturing
Additive Manufacturing
Official case: MINISLIDE MSQ for laser deflection units, serving aerospace, automotive, medical, and tooling industries. 3D printing equipment linear axes.
MINISLIDE MSQ MINIRAIL
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Product Portfolio
Precision Linear Guidance Product Families
MINIRAIL
Miniature Profile Rail Guide
2-row recirculating long-stroke design. Speed ≤ 5 m/s, acceleration ≤ 300 m/s². Stainless steel version, vacuum 10⁻⁷ mbar. Optional Cage Assist.
Type R / RN / RNG
Cross-Roller Guideway
Limited-stroke precision positioning. Type R: world's first standardized frictionless guideway. Type RN with 3x load capacity, optional FORMULA-S Cage Control.
Type N/O · M/V
Needle Cage Guideway
Maximum load capacity, rigidity and accuracy. Steel-plastic composite cage with lower displacement resistance than conventional needle guideways. Same installation as Type R/RN.
MINISLIDE MS · MSQ
Micro Frictionless Table
MS: for high temperature and ultra-high vacuum. MSQ: hardened guideway with integrated Cage Control, Gothic arch 4-point contact groove, speed ≤ 3 m/s, -30°C to +120°C.
MINISCALE PLUS · MSQscale
Integrated Measuring System
Built-in optical scale in guideway, measuring resolution 0.1 µm. Eliminates standalone encoder installation space, provides closed-loop position feedback. Operating temperature -40°C to +80°C.
Custom Systems
Precision Positioning Systems
From XY to 5-axis (including tilt), vacuum 10⁻⁹ mbar, nanometer stability, ms settling time. Approx. 40 years of semiconductor industry experience, 800+ FPD systems installed.
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