Vacuum Positioning Systems
Precision Linear Guidance Applications
Schneeberger develops custom precision positioning systems capable of operating at partial pressures down to 10⁻⁹ mbar, designed for e-beam inspection, EUV metrology, SEM, and other semiconductor and scientific instruments. Key design considerations include EUV compatibility, outgassing control, thermal management, pump-down time optimization, stability assurance, and magnetic disturbance mitigation.
Linear Guidance Challenges in Vacuum Positioning Systems
Positioning systems inside vacuum chambers must overcome stringent requirements including ultra-low partial pressure, outgassing control, magnetic disturbance mitigation, and cleanroom assembly — far exceeding the specifications of standard atmospheric positioning equipment.
Ultra-Low Partial Pressure
E-beam inspection and EUV metrology equipment require systems to operate stably at partial pressures of 10⁻⁹ mbar. All materials, lubricants, and cables must pass rigorous vacuum compatibility verification to ensure no contamination of optical components or detectors.
Outgassing Control
Schneeberger machines all aluminum structural components in-house, maintaining strict control over material sources and manufacturing processes to ensure outgassing rates meet vacuum chamber requirements. Pump-down time optimization is also a key consideration in system design.
Magnetic Disturbance Mitigation
E-beam and SEM equipment are extremely sensitive to magnetic field variations. The linear motors used in vacuum positioning systems require specialized shielding designs to prevent magnetic fields from deflecting electron beams or affecting image quality.
Cleanroom Assembly
Vacuum positioning systems are assembled, tested, and packaged in cleanroom environments to ensure delivery free of particulate contamination. Dedicated vacuum cables and connectors are also integrated under controlled conditions.
Vacuum Positioning System Solutions
Schneeberger offers a complete range of solutions from custom multi-axis vacuum positioning systems to vacuum-modified standard components, covering vacuum levels from 10⁻⁷ to 10⁻⁹ mbar.
Custom Vacuum Positioning Systems
Complete custom solutions from XY dual-axis to 5-axis (including tilt), capable of operating at partial pressures of 10⁻⁹ mbar. Equipped with linear motors (with dedicated magnetic shielding) and piezo drive units, along with specialized vacuum cables. All aluminum structural components are machined in-house at Schneeberger for strict outgassing control. Systems are assembled, tested, and packaged in cleanroom environments.
- Partial pressure down to 10⁻⁹ mbar, EUV compatible
- Configurations: XY / XYT / 5-axis (incl. tilt) / gantry
- Drive: linear motors (with magnetic shielding) + piezo drive units
- All aluminum parts machined in-house for outgassing control
- Dedicated vacuum cables and connectors
- Cleanroom assembly, testing, and packaging
MINISLIDE MS Micro Frictionless Table
A limited-stroke micro frictionless table officially rated for ultra-high vacuum environments. Features an integrated plastic cage with centering function. Gothic arch grooves provide 15 times the load capacity of 90° V-grooves, with zero backlash design. The non-recirculating structure theoretically generates fewer particles than recirculating guideways.
- Rated for ultra-high vacuum (official specification)
- Rail width 4 mm / 5 mm, system length 10–40 mm
- Speed ≤ 1 m/s, acceleration ≤ 50 m/s²
- Gothic arch grooves, 15x load capacity
- Zero backlash, corrosion-resistant hardened steel
- Operating temperature -40°C to +80°C
MINIRAIL Vacuum-Modified Version
The standard MINIRAIL is vacuum compatible to 10⁻⁷ mbar. The PEEK-modified version can further achieve 10⁻⁹ mbar by removing wipers, replacing venting screws, and using cleanroom packaging. Suitable for long-stroke positioning requirements outside or on the periphery of vacuum chambers.
- Standard version: 10⁻⁷ mbar
- PEEK-modified version: 10⁻⁹ mbar (wipers removed, venting screws replaced, cleanroom packaging)
- Speed ≤ 5 m/s, acceleration ≤ 300 m/s²
- Optional Cage Assist for ball circulation stability
- Fully interchangeable carriages
- LUBE-S version not suitable for vacuum and cleanroom
Note: MINIRAIL is a recirculating linear guideway component, suitable for long-stroke positioning requirements on the periphery of vacuum systems. For multi-axis positioning inside EUV/e-beam chambers, use the custom vacuum positioning systems described above.
Real-World Vacuum Positioning System Applications
Schneeberger has officially documented 7 vacuum positioning systems covering e-beam inspection, EUV metrology, SEM, and other applications. Below are representative cases and the complete system inventory.
Explore Related Applications
Need a Vacuum Positioning Solution?
Schneeberger provides comprehensive services from initial specification discussions to system delivery. Contact our engineering team for a vacuum positioning system solution tailored to your requirements.