Semiconductor Inspection & Metrology
Custom Precision Positioning Systems
Semiconductor Inspection & Metrology — Custom Precision Positioning Systems
With approximately 40 years of experience in semiconductor positioning systems, Schneeberger delivers custom precision positioning platforms featuring nanometre stability and millisecond move-and-settle times. These systems are applied in mask inspection, wafer AOI, and automated optical metrology for front-end process equipment. They are not off-the-shelf linear guideway components, but fully custom positioning solutions covering design, assembly, and testing.
Positioning Challenges in Semiconductor Inspection & Metrology Equipment
Mask inspection, wafer AOI, and metrology equipment impose extremely stringent demands on positioning system stability, speed, and integration, requiring specialised custom positioning solutions.
Nanometre Stability
Mask inspection and wafer metrology require sub-nanometre positioning stability. Schneeberger states: "The world of nanometres stability ... is our world." This is a core capability of custom positioning systems and cannot be achieved with standard linear guideway components.
Millisecond Move & Settle
High-throughput semiconductor equipment demands rapid move-and-settle times (in milliseconds) to maintain wafer-per-hour throughput. Schneeberger custom systems optimise motion profiles and control parameters to achieve the balance between high speed and high stability.
Multi-Axis Integration
Inspection and metrology equipment typically requires XY, XYT, or even XYZT multi-axis coordination. Schneeberger provides integrated system solutions encompassing platform mechanics, controllers, and active vibration isolation, reducing system integration effort on the customer side.
Cleanroom Assembly
Semiconductor-grade positioning systems must be assembled, tested, and packaged in cleanroom environments to ensure they meet cleanliness requirements upon delivery. Schneeberger maintains comprehensive cleanroom manufacturing and quality control processes.
Positioning Solutions for Semiconductor Inspection & Metrology
From fully custom positioning systems to standard precision guideway components, Schneeberger offers multi-tier product solutions to meet varying integration requirements.
Precision Positioning Systems
The Schneeberger Precision Positioning Systems division provides complete custom solutions from XY to XYZT configurations. With approximately 40 years of SEMI industry experience, these systems deliver nanometre stability and millisecond move-and-settle times, supporting 450mm wafers. Solutions encompass platform mechanics, controllers, and active vibration isolation integration, all assembled and tested in cleanroom environments.
- Nanometre stability, millisecond move-and-settle (ms move-and-settle)
- XY / XYT / XYZT multi-axis custom configurations
- Support for 450mm wafer handling
- Controller and active vibration isolation can be integrated into the system
- Cleanroom assembly, testing, and packaging
- Rapid development cycles, fast production ramp-up
Cross-Roller Guideway Type R / RN
Cross-roller guideways are designed for limited-stroke precision stage applications. Type R is the world's first standardised frictionless guideway, available in standard sizes 1-12, lengths 20-1500mm. Type RN is dimensionally interchangeable with Type R, offering 3x the load capacity, with optional FORMULA-S Cage Control to prevent cage migration.
- Type R: standard sizes 1-12, lengths 20-1500 mm
- Type RN: 3x load capacity, direct replacement for Type R
- RN optionally equipped with Cage Control (FORMULA-S)
- FORMULA-S specifications: 300 m/s², 1 m/s, vacuum 10⁻⁷ mbar
- Operating temperature -40°C to +80°C
- Simultaneous axial and radial load capability
Recirculating Miniature Guideway + Integrated Measurement
Recirculating miniature guideways are used for long-stroke applications such as equipment frames and transfer axes. MINISCALE PLUS integrates a measuring encoder within the MINIRAIL guideway (resolution 0.1 um), providing position feedback signals for closed-loop control, simplifying system design and reducing installation space.
- MINIRAIL: speed ≤ 5 m/s, acceleration ≤ 300 m/s²
- MINISCALE PLUS measurement resolution 0.1 um
- Vacuum compatible 10⁻⁷ mbar (PEEK modification achieves 10⁻⁹ mbar)
- MINISCALE PLUS cleanroom ISO 6-7 (ISO 14644-1)
- Eliminates individual axis preload adjustment, consistent preload values
- Fully interchangeable carriages for convenient on-site maintenance
Schneeberger Custom Systems for Semiconductor Inspection & Metrology
The following are officially published Schneeberger custom positioning systems for semiconductor inspection and metrology, all shown with actual delivered product system photographs.
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