Miniature Components
Miniature Components — MINIRAIL · MINISLIDE MS · MINISLIDE MSQ
Ultra-compact guidance systems covering ball guideways and micro slides
For medical instruments, semiconductor manufacturing, optical equipment and other high-precision miniaturized applications
MINI-X Miniature Guideway / Slide Family
The latest generation of miniature guideways for demanding applications — from ball guideways to micro slides, covering all precision miniature guidance needs
MINIRAIL
Miniature Ball Bearing Guideway
- Outstanding design ensures process reliability
- Speed up to 5 m/s, acceleration 300 m/s²
- Precision-machined carriages are interchangeable
- Tight clearance reduces contamination risk
- Optimized ball recirculation for low running pulsation
- Vacuum compatible to 10-7 mbar (up to 10-9)
- LUBE-S long-term lubrication, maintenance-free
- Unlimited rail length
MINISLIDE MS
Maximum Performance, Minimum Space
- Gothic arch profile, 15x higher load capacity than 90° V-type
- Minimum weight for compact, robust construction
- Material and design achieve high-level rigidity
- Vacuum compatible to 10-7 mbar
- Cage centering system
MINISLIDE MSQ
Productivity Package
- Integrated cage control for maximum process reliability
- Compact double-row profile for high load capacity
- Minimum weight for compact, robust construction
- Vacuum compatible to 10-9 mbar
Precision Miniature Guidance Technology
Core technological advantages from the MINIRAIL, MINISLIDE MS and MINISLIDE MSQ series
MINIRAIL Miniature Ball Guideway
Gothic Arch Profile
15x higher load capacity than 90° V-type profile. Compact construction with minimum weight.
High Speed & Acceleration
Innovative ball recirculation insert design enabling speeds up to 5 m/s and acceleration up to 300 m/s².
LUBE-S Long-Term Lubrication
Patented lubrication solution, 20,000 km maintenance-free with no additional space required.
Fully Hardened Stainless Steel
Rails and carriages made from fully hardened stainless steel for corrosion resistance and high hardness.
Carriage Interchangeability
Precisely matched dimensions (< 1 µm) allow free interchangeability, simplifying inventory management.
Four Carriage Lengths
MNNS / MNN / MNNL / MNNXL for flexible motion axis design.
Maximum Contamination Protection
Ultra-precision clearance prevents contamination. Profile scrapers snap in/out, mounting holes can be sealed.
Simple Installation & Maintenance
Balls held by retaining wire allow carriages to slide freely along the rail for convenient replacement.
MINISLIDE MS Miniature Ball Slide
Ultimate Miniaturization
MS 4 compared to a dime — precision guidance in the most extreme spaces.
Gothic Arch Profile
15x higher load capacity than 90° V-type profile. Highest rigidity in its class.
Cage Centering System
One-piece plastic cage with integrated centering feature for precise positioning and creep resistance.
Fully Hardened Stainless Steel
Made from fully hardened stainless steel, vacuum compatible to 10-7 mbar.
MINISLIDE MSQ High-Performance Ball Slide
Mechanical Cage Centering
Rack and pinion directly integrated, completely eliminating creep with mechanical limit protection.
High Speed & Acceleration
Speed up to 3 m/s, acceleration up to 300 m/s² meeting the most advanced propulsion demands.
O-Arrangement Maximum Rigidity
Four-track O-arrangement with 90° offset zero-backlash preload for highest moment rigidity.
Fully Hardened Stainless Steel
Made from fully hardened stainless steel, vacuum compatible to 10-9 mbar.
The Core of Precision Miniature Applications
From medical diagnostics to semiconductor manufacturing — precision solutions for miniature guidance systems
Medical Technology
- Microsurgery precision positioning
- Liquid Handler
- Microtome
- Microscope focusing & scanning stages
- Diagnostic equipment precision positioning
Dental Medicine
- Dental milling machines (CAD/CAM)
- Dental 3D printing equipment
- Oral scanner positioning systems
- High-speed, high-acceleration dynamic machining
Biotechnology
- Automated pipetting workstations
- Laboratory automation equipment
- High-throughput screening systems
- Precision positioning & motion systems
Semiconductor & Electronics Inspection
- Wire Bonder
- Die Bonder
- Flying Probe Tester
- Cleanroom micro positioning
- Wafer inspection platforms
Precision Metrology
- Laser interferometer positioning systems
- CMM probes
- Surface topography measurement equipment
- Profilometers & roughness testers
Optical Industry
- High-speed scanning & positioning systems
- Laser optics precision alignment
- Fiber optic alignment equipment
- Interferometer optical platforms
Micro Automation
- Micro-precision assembly equipment
- Robot end effectors
- Micro-assembly positioning platforms
- Nanotechnology positioning systems
Micro Automation — Precision Assembly
- Micro-component automated assembly
- Vision-guided positioning systems
- Small part welding & bonding
- Microfluidic dispensing equipment
Nanotechnology
- Molecular Beam Epitaxy (MBE) systems
- Nanoimprint equipment positioning
- Atomic Force Microscope (AFM) platforms
- Thin film deposition equipment
Technical Documentation Center
Complete selection guides, dimensional specifications and installation instructions
Product Series
MINIRAIL
Miniature Ball Guideway — Narrow & Wide sizes
MINISLIDE MS / MSQ
Micro Slides — Including integrated measurement version
MINISCALE PLUS
Miniature Measurement System — For MINIRAIL
Engineering Reference
Need Miniature Component Technical Support?
Complete selection guides, dimension tables and load calculation methods — all available in the Tech Center.