6.4 Vacuum
Corrosion resistant guideways are preferred for use in a vacuum. It is also necessary to avoid out-gassing of plastics, to ensure vented of attachment holes and to use an appropriate lubricant.
On request, SCHNEEBERGER can deliver the guideways packaged in a cleanroom and lubricated according to requirements.
Vacuum ranges for standard MINI-X products:
| MINIRAIL | 10⁻⁷ mbar (HV). 10⁻⁹ mbar (UHV) on request. The values apply without wipers |
|---|---|
| MINISCALE PLUS | On request |
| MINISLIDE MS | 10⁻⁷ mbar (HV) |
| MINISLIDE MSQ | 10⁻⁹ mbar (UHV) |
Notes: the suitability for a vacuum depends on the materials used.